China Star
Industry Description:
Semiconductors, TFT-LCD and related industries. In general, most of them have the characteristics of large air volume (air volume> 10,000CMH) and low concentration (concentration <500ppm as CH4), and the composition of the exhaust gas often contains high boiling point, Low-difference chemicals such as IPA, Acetone, MEA, DMSO, PGME, PGMEA, trimethylbenzene, NMP, etc., cause difficulty in handling. As the exhaust air volume is quite large and the concentration is not high, directly to the incineration of the method, the operating costs are quite high. IPA and Acetone of the boiling point is very low, the washing method, dissolved in water, but the solvent may be made out of the possible, not applicable. In addition, some processes often accompanied by HMDS, at high temperatures, easy to decompose and cause degradation of processing efficiency or equipment failure. Therefore, the more commonly used treatment technology to (concentrated + incineration) or (concentrated + condensation) two methods of the most cost-effective, which concentrated equipment is only zeolite wheel concentration and fluidized bed enrichment of two units were confirmed as feasible, Others such as fixed bed, fiber bed, etc. are due to security problems (due to the treatment of solvents are mostly oxygen-containing compounds, such as: IPA, Acetone ... and so on, easy to cause carbon bed fire problems, or because of frequent regeneration needs, On the regeneration, not only operational inconvenience, and difficult to meet the current environmental regulations) and less use. As for what method is better, it depends entirely on the use of the unit's exhaust characteristics and available utilities (Utility) may be.
